Grinding method of a disk-shaped substrate and grinding apparatus
AssigneesShowa Denko K.K., Citizen Seimitsu Co., Ltd.
InventorsKazuyuki HANEDA, Satoshi Fujinami
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Abstract
The grinding method of a disk-shaped substrate that grinds a disk-shaped substrate including a portion having a hole at the center thereof while rotating the disk-shaped substrate is provided with: grinding an inner circumference of the disk-shaped substrate while an inner circumference grinding device is fed in a radial direction toward an outer circumference of the disk-shaped substrate and grinding the outer circumference of the disk-shaped substrate while an outer circumference grinding device is fed in the radial direction toward the inner circumference of the disk-shaped substrate; and stopping the feedings of the inner circumference grinding device and the outer circumference grinding device at the same time.
Claims15
A grinding method of a disk-shaped substrate that grinds a disk-shaped substrate including a portion having a hole at the center thereof while rotating the disk-shaped substrate, comprising:
- grinding an inner circumference of the disk-shaped substrate while an inner circumference grinding device is fed in a radial direction toward an outer circumference of the disk-shaped substrate and grinding the outer circumference of the disk-shaped substrate while an outer circumference grinding device is fed in the radial direction toward the inner circumference of the disk-shaped substrate;
- and
- stopping the feedings of the inner circumference grinding device and the outer circumference grinding device at the same time.
A grinding apparatus comprising:
- an inner circumference grinding stone that grinds an inner circumference of a disk-shaped substrate;
- an outer circumference grinding stone that grinds an outer circumference of the disk-shaped substrate;
- an inner circumference grinding stone moving mechanism that moves the inner circumference grinding stone in a radial direction toward the outer circumference of the disk-shaped substrate;
- an outer circumference grinding stone moving mechanism that moves the outer circumference grinding stone in the radial direction toward the inner circumference of the disk-shaped substrate;
- and
- a controller that operates the inner circumference grinding stone moving mechanism and the outer circumference grinding stone moving mechanism while rotating the inner circumference grinding stone and the outer circumference grinding stone, and stops the inner circumference grinding stone moving mechanism and the outer circumference grinding stone moving mechanism at the same time so as to grind the disk-shaped substrate.
Dependencies are inferred from the claim text.