Manufacturing method of display device

A manufacturing method of a display device including a step for forming pseudo single crystal which has strip-like crystals in preset regions of a semiconductor film formed on a substrate by radiating an energy beam to the semiconductor film, the step for forming the pseudo single crystal comprising:

• a first step for forming the pseudo single crystal by radiating the energy beam to a first region of the semiconductor film while moving a radiation position of the energy beam on the substrate in a first direction;
• and
• a second step for forming the pseudo single crystal by radiating the energy beam to a second region of the semiconductor film while moving a radiation position of the energy beam on the substrate in a second direction opposite to the first direction, and
• the first region and the second region in which the pseudo single crystal is formed by the respective steps consisting of the first step and the second step respectively set sizes thereof in a direction orthogonal to the moving direction of the radiation position at a position where the radiation of the energy beam is finished smaller than sizes thereof in the direction orthogonal to the moving direction of the radiation position at a position where the radiation of the energy beam is started, and
• the second region includes a portion where the second region overlaps the first region and a portion where the second region does not overlap the first region.