Magnetic recording head and media comprising aluminum oxynitride underlayer and a diamond-like carbon overcoat
AssigneeSAE Magnetics (H.K.) Ltd.
InventorsShide Cheng, Zhu Feng, Ellis T. Cha
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AssigneeSAE Magnetics (H.K.) Ltd.
InventorsShide Cheng, Zhu Feng, Ellis T. Cha
Estimating the term…
A method for forming a protective bilayer on a magnetic read/write head or magnetic disk. The bilayer is formed as an adhesion enhancing underlayer and a protective diamond-like carbon (DLC) overlayer. The underlayer is formed of an aluminum or alloyed aluminum oxynitride, having the general formula AlOxNy or MezAlOxNy where Mez symbolizes Tiz, Siz or Crz and where x, y and z can be varied within the formation process. By adjusting the values of x and y the adhesion underlayer contributes to such qualities of the protective bilayer as stress compensation, chemical and mechanical stability and low electrical conductivity. Various methods of forming the underlayer are provided, including reactive ion sputtering, plasma assisted chemical vapor deposition, pulsed laser deposition and plasma immersion ion implantation.
A protected magnetic read/write head comprising:
A protected magnetic read/write head comprising:
A surface-protected magnetic disk comprising:
A surface-protected magnetic disk comprising:
A method of forming a protected read/write head, a plurality of protected read/write heads or a surface protected magnetic disk comprising:
Dependencies are inferred from the claim text.