Vertical carbon nanotube device in nanoporous templates
AssigneePurdue Research Foundation
InventorsMatthew Ralph Maschmann, Timothy Scott Fisher, Timothy Sands, Rashid Bashir
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Abstract
A modified porous anodic alumina template (PAA) containing a thin CNT catalyst layer directly embedded into the pore walls. CNT synthesis using the template selectively catalyzes SWNTs and DWNTs from the embedded catalyst layer to the top PAA surface, creating a vertical CNT channel within the pores. Subsequent processing allows for easy contact metallization and adaptable functionalization of the CNTs and template for a myriad of applications.
Claims35
An apparatus comprising:
- a first non-electrically conducting layer including a plurality of vertical nanopores;
- a second layer comprising a catalyst for synthesis of carbon nanostructures
- a third non-electrically conducting layer including the plurality of nanopores, said second layer being between said first layer and said third layer;
- and
- a carbon nanotube in each of said plurality of nanopores, said nanotube having two or fewer walls.
The apparatus of claim 8 wherein the metal is one of Fe, Co, or Ni.
A method comprising:
- providing a substrate;
- placing a first layer of a material on the substrate
- placing on the first layer a catalyst for synthesis of carbon nanostructures;
- placing a second layer of the material on the catalyst;
- creating a plurality of nanopores in the first layer, catalyst, and second layer;
- and
- synthesizing with the catalyst a carbon nanostructure in each of the nanopores.
A method comprising:
- providing a substrate;
- placing a first layer of a material on the substrate placing on the first layer a catalyst for synthesis of carbon nanostructures;
- placing a second layer of the material on the catalyst;
- diffusing the catalyst into at least one of the first layer or the second layer;
- and
- synthesizing with the catalyst a carbon nanostructure after said diffusing.
A method comprising:
- providing a substrate;
- placing a first layer of a material on the substrate;
- placing on the first layer a catalyst for synthesis of carbon nanostructures;
- creating a plurality of nanopores in the first layer;
- placing the nanoporous substrate with the material and the catalyst in a chamber having an organic material in the vapor phase and a plasma;
- electrically biasing the substrate relative to the walls of the chamber after said placing;
- synthesizing with the catalyst a carbon nanostructure in each of the nanopores during said biasing.
Dependencies are inferred from the claim text.