Optical member and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsZuyi Zhang, Hiroyuki Tanaka, Masayuki Yamada
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Abstract
An optical member including an oxide layer that has a stable fine textured structure and is excellent in durability is provided. The optical member includes a base material and an antireflection coating on a surface of the base material. The antireflection coating includes at least an oxide layer having a fine textured structure on the surface, and the oxide layer contains a phosphate compound. Furthermore, a method of manufacturing the optical member is provided.
Claims13
An optical member comprising:
- a base material;
- and
- an antireflection coating on a surface of the base material, wherein
- the antireflection coating includes at least an oxide layer having a fine textured structure on the surface and containing phosphorus.
A method of manufacturing an optical member having a base material and an oxide layer, the method comprising:
- forming an oxide layer provided with a fine textured structure thereon on a surface of a base material;
- and
- phosphating the oxide layer provided with the fine textured structure thereon.
Dependencies are inferred from the claim text.