Coating treatment apparatus, substrate treatment system, coating treatment method, and computer storage medium
AssigneeTokyo Electron Limited
InventorMakoto MURAMATSU
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Abstract
In the present invention, a spin chuck which horizontally holds a substrate by vacuum suction is provided inside a treatment container of a coating treatment apparatus. Above the spin chuck, a coating nozzle is located for applying a coating solution containing a coating film forming component in the liquid state onto the central portion of the surface of the substrate. In an upper portion of the treatment container, an irradiation unit is provided which applies ultraviolet rays to the substrate on the spin chuck. After applying the coating solution onto the pattern on the substrate from the coating nozzle, ultraviolet rays are applied from the irradiation unit to the applied coating solution to form a coating film.
Claims20
A coating treatment apparatus for forming a coating film over a pattern formed on a substrate, comprising:
- a treatment container for housing the substrate, including a transfer-in/out port for transferring-in/out the substrate;
- a coating nozzle for applying a coating solution containing a coating film forming component in a liquid state onto the pattern on the substrate housed in said treatment container;
- and
- an irradiation unit for applying ultraviolet rays to the coating solution applied over the pattern on the substrate.
A substrate treatment system comprising a coating treatment apparatus for applying a coating solution onto a pattern formed on a substrate, and a transfer unit for transferring the substrate into/from the coating treatment apparatus,
- wherein said transfer unit comprises a transfer arm for supporting and transferring the substrate, and an irradiation unit for applying ultraviolet rays to the coating solution over the pattern on the substrate, the substrate being supported by said transfer arm.
A coating treatment method of forming a coating film over a pattern formed on a substrate,
- a coating solution for forming the coating film containing a coating film forming component in a liquid state and a solvent, the coating film forming component containing a photopolymerization initiator,
- said method comprising:
- a coating step of applying the coating solution onto the pattern on the substrate;
- and
- an irradiation step of applying ultraviolet rays to the coating solution applied over the pattern on the substrate to activate the photopolymerization initiator to form a coating film.
A readable computer storage medium storing a program running on a computer of a control unit for controlling a coating treatment apparatus or a substrate treatment system to cause the coating treatment apparatus or the substrate treatment system to perform a coating treatment method of forming a coating film over a pattern formed on a substrate,
- a coating solution for forming the coating film containing a coating film forming component in a liquid state and a solvent, the coating film forming component containing a photopolymerization initiator,
- said coating treatment method comprising:
- a coating step of applying the coating solution onto the pattern on the substrate;
- and an irradiation step of applying ultraviolet rays to the coating solution applied over the pattern on the substrate to activate the photopolymerization initiator to form a coating film.
Dependencies are inferred from the claim text.