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US 2008/0175984 A1Published application
Method of forming a carbon nano-tube
AssigneeSamsung Electronics Co., Ltd.
InventorsHong-Sik YOON, Young-Moon CHOI, Sun-Woo LEE
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Abstract
In a method of forming carbon nano-tubes, a catalytic film is formed on a substrate. The catalytic film is then transformed into preliminary catalytic particles. Thereafter, the preliminary catalytic particles are transformed into catalytic particles. Carbon nano-tubes then grow from the catalytic particles. The carbon nano-tubes have relatively high conductivity and high number density.
Claims20
A method of forming carbon nano-tubes, the method comprising:
- forming a catalytic film on a substrate;
- transforming the catalytic film into preliminary catalytic particles;
- transforming the preliminary catalytic particles into catalytic particles;
- and
- growing carbon nano-tubes from the catalytic particles.
2 more elements
A method of forming carbon nano-tubes, the method comprising:
- placing a substrate in a chamber;
- forming a catalytic film on the substrate;
- introducing a source gas and a carrier gas into the chamber and establishing first process parameters, thereby transforming the catalytic film into preliminary catalytic particles;
- establishing second process parameters, thereby transforming the preliminary catalytic particles into catalytic particles;
- and
- establishing third process parameters, thereby growing carbon nano-tubes on the catalytic particles.
3 more elements
Dependencies are inferred from the claim text.