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US 2008/0175529 A1Published application
Micromachined optical pressure sensor
AssigneeKulite Semiconductor Products, Inc.
InventorsAnthony D. Kurtz, Boaz Kochman, Joseph VanDeWeert
Life of this patent
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Abstract
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.
Claims16
A pressure sensor comprising:
- a deflectable diaphragm including a substantially central boss and surrounding thinned channel;
- and,
- an optical waveguide having first and second arms, wherein said first arm is substantially aligned with an edge of said boss and said second arm is substantially aligned with an edge of said channel.
- a light source coupled to said optical waveguide for introducing light to said waveguide and;
- a light detector coupled to said waveguide for detecting changes in the intensity of light.
2 more elements
A method for making an optical pressure sensor comprising:
- Selectively thinning a Si containing wafer to include a substantially central boss and surrounding thinned channel;
- and,
- forming an optical waveguide having first and second arms, wherein said first arm is substantially aligned with an edge of said boss and said second arm is substantially aligned with an edge of said channel.
Dependencies are inferred from the claim text.