Inspection apparatus and inspection method

Abstract

An inspection apparatus 1 for detecting a defect on an inspection surface of a sample 2 by inspecting an image captured of the inspection surface, comprises: a defect detection unit 24 for taking as an input the image captured of the inspection surface of the sample 2, and for detecting a defect appearing in the image; a standard defect data storing unit 61 for storing position information of a known standard defect 9 formed in advance on the inspection surface of the actual sample 2; and a detection sensitivity judging unit 50 for judging whether the defect detection unit can detect the standard defect 9 located at the position that the position information stored in the standard defect data storing unit 61 indicates in the image captured of the inspection surface of the sample 2 containing the standard defect 9.

Dependencies are inferred from the claim text.