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US 2008/0174930 A1Published application
Electrostatic chuck with heater and manufacturing method thereof
AssigneeNGK Insulators, Ltd.
InventorsAkiyoshi Hattori, Kazuhiro Nobori
Life of this patent
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Abstract
An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
Claims10
An electrostatic chuck, comprising:
- a plate-like base that is made of ceramics and has a substrate mounting surface on which a substrate is to be mounted;
- and
- a dielectric electrode embedded in the base,
- wherein the base includes a support portion made of alumina ceramics, and a surface portion that is made of yttria ceramics and forms at least the substrate mounting surface of the base on a surface of the base, and
- a carbon content in alumina ceramics in a vicinity of the dielectric electrode is 0.05 wt %.
2 more elements
A manufacturing method of an electrostatic chuck, comprising the steps of:
- forming a plate-like alumina sintered body with a carbon content of 0.05 wt % or less from a raw material of alumina ceramics;
- forming a dielectric electrode on one surface of the alumina sintered body;
- forming an yttria member so as to cover the dielectric electrode and the surface of the alumina sintered body, on which the dielectric electrode is formed;
- and
- sintering the alumina sintered body and the yttria member while integrally pressing the alumina sintered body and the yttria member in a uniaxial direction, thereby forming a base.
2 more elements
Dependencies are inferred from the claim text.