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US 2008/0174876 A1Published application
Optical article and manufacturing method thereof
AssigneeSeiko Epson Corporation
InventorsTomohito FUKUI, Keiichi SUZUKI
Life of this patent
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Abstract
An optical article includes: an optical base; and a layer that is provided on the optical base and contains SiO2 as a main component, the layer being a silicon-nitride-containing silicon oxide layer containing SisOtNu (s>0, T≧0, u>0).
Claims6
An optical article, comprising:
- an optical base;
- and
- a layer that is provided on the optical base and contains SiO2 as a main component, the layer being a silicon-nitride-containing silicon oxide layer containing SisOtNu(s>0, T≧0, u>0).
A method for manufacturing an optical article that includes:
- an optical base;
- and a layer that is provided on the optical base and contains SiO2 as a main component, the layer being a silicon-nitride-containing silicon oxide layer containing SisOtNu(s>0, T≧0, u>0), the method comprising:
- introducing nitrogen-containing gas when the silicon-nitride-containing silicon oxide layer is formed on the optical base by a deposition.
Dependencies are inferred from the claim text.