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US 2008/0174855 A1Published application
Deformable mirror device with oscillating states
AssigneesSilicon Quest Kabushiki-Kaisha, Olympus Corporation
InventorsYoshihiro Maeda, Fusao Ishii, Hirotoshi Ichikawa, Kazuma Arai
Life of this patent
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Abstract
A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.
Claims19
A mirror device which deflects incident light, comprising:
- a mirror arranged on a substrate and supported by a hinge;
- an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state;
- a drive circuit applying a voltage to the address electrode;
- and
- a first stopper unit determining an oscillation amplitude in the oscillating state.
2 more elements
A mirror device that deflects incident light, comprising:
- a mirror arranged on a substrate and supported by a hinge substantially perpendicular to the substrate;
- a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state or an intermediate state;
- a drive circuit for applying a voltage to the address electrode;
- and
- a stopper unit for determining the oscillating state or the intermediate state.
2 more elements
Dependencies are inferred from the claim text.