System and method of interferometric imaging using a digital micromirror device
OwnerMichael J. Materinventor
Life of this patent
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Abstract
A method of interferometric imaging includes a) focusing an interference pattern of a surface of an object onto a digital micromirror device, b) reflecting interfered electromagnetic radiation from a first plurality of mirrors of the digital micromirror device onto a detector, and recording the integrated intensity of the reflected interferometric radiation, repeating step b) for a second plurality of mirrors, and computing the interference pattern of the surface of the object from the recorded integrated intensities.
Claims25
A method of interferometric imaging, comprising:
- a) focusing an interference pattern of a surface of an object onto a digital micromirror device;
- b) using a first plurality of mirrors of the digital micromirror device to reflect interfered electromagnetic radiation onto a detector, and recording the integrated intensity of the reflected interferometric radiation;
- c) repeating step b) using a second plurality of mirrors;
- d) computing the interference pattern of the surface of the object from the recorded integrated intensities.
A method of interferometric imaging, comprising:
- a) using a first plurality of mirrors of the digital micromirror device to reflect electromagnetic radiation onto an object, and record an integrated intensity and an interference pattern of the electromagnetic radiation reflected from the object;
- b) repeating step a) using a second plurality of mirrors;
- c) computing the interference pattern of the surface of the object from the recorded integrated intensities.
An interferometric imaging system, comprising:
- an electromagnetic radiation source, oriented to emit electromagnetic radiation onto an object;
- an optical subsystem, wherein the optical subsystem optically processes the electromagnetic radiation to produce an object beam and a reference beam;
- a digital micromirror device that reflects the object beam and the reference beam from the optical subsystem onto a detector;
- a detector that receives the object beam and the reference beam from the digital micromirror device;
- and
- a processor that processes images from the detector.
An interferometric imaging system, comprising:
- an electromagnetic radiation source;
- a digital micromirror device that reflects the emitted electromagnetic radiation onto an object;
- an optical subsystem, wherein the optical subsystem focuses the electromagnetic radiation reflected from the object into an object beam;
- a detector that receives the object beam and the reference beam from the optical subsystem;
- and
- a processor that processes images from the detector.
Dependencies are inferred from the claim text.