Method and apparatus for inspecting a surface
AssigneeVistec Semiconductor Systems GmbH
InventorAlbert Kreh
Life of this patent
Estimating the term…
Abstract
A method and an apparatus for inspecting a surface of a wafer disclosed. At least one incident-light illuminator is provided to illuminate an area of the surface of the wafer in a first and a second illumination mode, in particular a bright-field and a dark-field illumination. At least one image detector is provided to detect an image of the illuminated area. A storage device is used for storing values on the intensity and the color of an optimized illumination of each incident-light illumination mode.
Claims19
A method of inspecting a surface of a wafer using an illuminator and an image detector, and an area of the wafer is illuminated with at least a first and a second illumination mode, comprising the steps of:
- detecting a color error of the illuminator in the first and second illumination modes;
- optimizing an adjustment of the first and second illumination modes;
- storing intensity and color of the surface to be inspected for the first and second illumination modes separately;
- and
- scanning further surfaces while using optimized adjustment for the first and second illumination modes while taking the color error of the illuminator into account.
An apparatus for inspecting a surface of a wafer, comprising:
- at least one incident-light illuminator to illuminate an area of the surface of the wafer in a first and a second illumination mode, and at least one image detector to detect an image of the illuminated area, and a storage device for storing values on intensity and color of an optimized illumination of each of the first and second illumination modes.
An apparatus for inspecting a surface of a wafer, comprising:
- at least one incident-light illumination means to illuminate an area of the surface of the wafer in a first and a second illumination mode, and at least one image detector to detect an image of the illuminated area, and means for storing values on intensity and color of an optimized illumination of each of the first and second illumination modes.
Dependencies are inferred from the claim text.