Automatic inspection system for flat panel substrate

A system comprising:

• an illumination component;
• a lens array configured to direct illumination of the illumination component at a portion of a substrate, wherein the lens array includes at least one Fresnel lens;
• and
• an imaging lens positioned between the lens array and the substrate, wherein the imaging lens is a telecentric lens.

A method comprising:

• generating illumination;
• directing the illumination at a portion of a substrate using a Fresnel lens;
• receiving at a time delay integration (TDI) sensor reflected light resulting from an interaction of the illumination with a surface of the substrate;
• and
• generating an image of the substrate using information of the reflected light.

A method comprising:

• generating illumination;
• directing the illumination towards a substrate using a Fresnel lens;
• directing reflected light at an imaging sensor using an imaging lens, wherein the reflected light results from an interaction of the illumination with a surface of the substrate, wherein the imaging lens is a telecentric lens;
• and
• generating an image of the substrate using the reflected light.