Photo-masks and methods of fabricating periodic optical structures
AssigneeGeorgia Tech Research Corporation
InventorsThomas K. Gaylord, Justin L. Stay, James D. Meindl
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AssigneeGeorgia Tech Research Corporation
InventorsThomas K. Gaylord, Justin L. Stay, James D. Meindl
Estimating the term…
Improved photo-masks for use in fabricating periodic structures are disclosed herein. Methods of making periodic structures, as well as the periodic structures fabricated therefrom, are also disclosed. The photo-mask can include a body element and one or more sets of diffractive elements and/or refractive elements disposed on the body element or within the body element. Each set of diffractive elements and/or refractive elements can be configured to produce four non-coplanar beams of light when a beam of light is passed through it. Each set of four non-coplanar beams of light can be used to interferometrically produce a specific periodic structure at a specific location within a photosensitive recording material.
A photo-mask for producing a periodic structure, comprising:
An apparatus for producing a periodic optical structure, the apparatus comprising:
A method of fabricating a periodic optical structure, the method comprising:
Dependencies are inferred from the claim text.