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AssigneeFujitsu Limited
InventorsAnh Tuan Nguyen, Tadashi Nakatani, Satoshi Ueda, Yu Yonezawa, Naoyuki Mishima
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A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
A micro-switching device comprising:
A method of manufacturing a micro-switching device comprising:
A method of manufacturing a micro-switching device comprising:
Dependencies are inferred from the claim text.