Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object

An inspection method for inspecting the electrical characteristics of an inspection object, the inspection method comprising;

• (a) mounting the inspection object on a mounting surface of a stage;
• (b) bringing at least one pair of probes in contact with at least one electrode on a second surface of the inspection object;
• (c) applying a voltage to the at least one pair of probes so as to generate a fritting phenomenon and forming an electrical path between each probe of the pair of probes and the at least one electrode by using the fritting phenomenon;
• and
• (d) connecting both probes of the at least one pair of probes to a test circuit so as to form an electrical path from the test circuit to the at least one electrode through both probes.

An inspection apparatus for inspecting electrical characteristics of an inspection object, comprising;

• a stage, on which the inspection object is to be mounted, comprising a mount surface for mounting the inspection object;
• a probe card disposed above the stage and having at least one pair of probes;
• a first fritting power supply adapted for applying a fritting voltage to both probes of the pair of probes when making contact with at least one electrode on a second surface of the inspection object and said electrode;
• and
• a test circuit adapted to be connected to both probes so as to form an electrical path from the test circuit to the at least one electrode through both probes of the at least one pair of probes.