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US 2008/0174052 A1Published application
Imprinting apparatus and imprinting method
AssigneeSamsung Electronics Co., Ltd.
InventorsKyu-Young Kim, Dae-Jin Park
Life of this patent
Estimating the term…
Abstract
An imprinting apparatus and an imprinting method that prevents movement of an imprinting mold during an imprinting process. The imprinting method includes coating a resin on a substrate; aligning an imprinting mold on the resin; temporarily securing the imprinting mold on the substrate; pressing the imprinting mold; hardening the resin; and detaching the imprinting mold.
Claims20
An imprinting method, comprising:
- coating a resin on a substrate;
- aligning an imprinting mold on the resin;
- temporarily securing the imprinting mold on the substrate;
- pressing the imprinting mold against the resin;
- hardening the resin;
- and
- detaching the imprinting mold.
4 more elements
An imprinting apparatus, comprising:
- a substrate support for mounting a substrate coated with a resin;
- an imprinting mold located on the substrate support to shape the resin and form a predetermined pattern;
- a temporary securing portion temporarily securing the imprinting mold;
- a pressure portion for pressing the imprinting mold against the substrate;
- and
- a resin-hardening portion for hardening the resin on the substrate.
3 more elements
The imprinting apparatus of clam 18, wherein the temporary securing portion includes at least two protrusions.
Dependencies are inferred from the claim text.