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US 2008/0173933 A1Published application
Semiconductor memory device
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiaki Fukuzumi, Hideaki Aochi, Ryota Katsumata
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Abstract
The semiconductor device includes a substrate having a conductive layer formed on its surface. The conductive layer has a columnar semiconductor formed thereon. The columnar semiconductor has an insulating layer formed therearound. The insulating layer has an electrode film formed therearound. The electrode film functions as an gate electrode of a transistor. The electrode film includes an laminate of two or more conductive films having different work functions.
Claims11
A semiconductor device comprising:
- a substrate having a conductive layer formed on its surface;
- a columnar semiconductor formed on the conductive layer;
- an insulating layer formed around the columnar semiconductor;
- and
- an electrode film formed around the insulating layer, the electrode film functioning as a gate electrode of a transistor,
- the electrode film comprising an laminate of two or more conductive films having different work functions.
3 more elements
Dependencies are inferred from the claim text.