Galvanic optocoupler and method of making
AssigneeSTMicroelectronics S.r.l.
InventorsMariantonietta Monaco, Massimiliano Fiorito, Gianpiero Montalbano, Salvatore Coffa
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AssigneeSTMicroelectronics S.r.l.
InventorsMariantonietta Monaco, Massimiliano Fiorito, Gianpiero Montalbano, Salvatore Coffa
Estimating the term…
A galvanic optocoupler of the type monolithically integrated on a silicon substrate and having at least one luminous source and a photodetector interfaced by means of a galvanic insulation layer. The photodetector can be a phototransistor realized in the silicon substrate, and the galvanic insulation layer (40) is a passivation layer of this phototransistor. The luminous source, above the galvanic insulation layer includes an integrated LED having a first and second polysilicon layer with function of cathode and anode, respectively, these first and second layers enclosing at least one light emitter layer, in particular a silicon oxide layer enriched with silicon (SRO). An integration process of a galvanic optocoupler thus made, in particular in BCD3s technology is provided.
A galvanic optocoupler monolithically integrated on a silicon substrate, and comprising:
An integration process of a galvanic optocoupler of the type monolithically integrated and having at least one luminous source and one photodetector interfaced by means of a galvanic insulation layer, comprising the steps of:
An optical device, comprising:
Dependencies are inferred from the claim text.