High vacuum valve

A high vacuum valve comprising:

• a housing having a valve flow channel provided in an interior thereof so as to extend in a direction of an axial line, a first opening formed in one end of said valve flow channel relative to said direction of said axial line, and a second opening formed in said housing so as to be oriented toward a direction perpendicular to said axial line;
• a first port connected to said first opening of said housing and communicated with said valve flow channel through said first opening;
• a second port connected to said second opening and communicated with said valve flow channel through said second opening;
• a valve seat provided around said first opening;
• a valve member housed in said valve flow channel for opening and closing said valve seat;
• a valve shaft received in said valve flow channel and extending in said direction of said axial line from a rear face of said valve member in said valve flow channel;
• a valve member driving section for driving, through said valve shaft, said valve member in said direction of said axial line;
• and
• an assembly comprising a bellows and a tubular member;
• said bellows housed in said valve flow channel and hermetically surrounding a periphery of said valve shaft;
• said bellows comprising a welded bellows;
• said welded bellows being formed by causing a plurality of annular thin metal sheets to be overlapped, and alternately welding outer peripheries of adjacent metal sheets, and inner peripheries of adjacent metal sheets;
• a tubular member housed in said valve flow channel and hermetically surrounding said periphery of said valve shaft;
• said tubular member and said welded bellows being connected to each other in said direction of said axial line;
• and
• said assembly being fixed at one end portion thereof to said rear face of said valve member and fixed at the other end portion thereof to a portion of said interior of said housing which is opposed to said rear face of said valve member.