Microwave plasma apparatus and method for materials processing

A method for processing a material in a plasma chamber, comprising the steps of:

• generating a plasma jet in the plasma chamber;
• supplying the material to the plasma chamber;
• and
• entraining the material in the plasma jet.

A microwave plasma apparatus for processing a material comprising:

• a plasma chamber;
• a microwave radiation source generating microwave radiation;
• a waveguide guiding the microwave radiation from the microwave radiation source to the plasma chamber;
• a first supply in fluid communication with the plasma chamber for providing a process gas to the plasma chamber;
• a second supply in fluid communication with the plasma chamber for providing a shrouding gas to the plasma chamber;
• and
• a material feeding system in communication with the plasma chamber for introducing a process material to the plasma chamber,
• wherein the microwave radiation comes into contact with the process gas to form a plasma jet, and
• wherein the process material, through contact with the plasma jet, forms a product material.