Fabrication of freestanding micro hollow tubes by template-free localized electrochemical deposition
OwnerSeung Kwon Seol, Jung Ho Je +1inventors
InventorsSeung Kwon Seol, Jung Ho Je, YeuKuang Hwu
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Abstract
The present invention relates to a method of fabricating a micro hollow tube. More specifically, the invention relates to a method of fabricating a micro hollow tube by template-free localized electrochemical deposition, in which the micro hollow tube is fabricated by the accurate control of the distribution of the electric field strength during deposition with precise interplay of the applied voltage and the distance between the microelectrode and the grown structure.
Claims7
A method of fabricating a micro hollow tube by template-free localized electrochemical deposition, the method comprising the steps of:
- (a) placing a microelectrode (anode) very close to a substrate (cathode) immersed in a plating bath;
- and (b) applying a voltage greater than a critical voltage to the microelectrode and the substrate via a electrochemical medium, and thereby to form a micro hollow tube structure on the substrate,
- wherein the critical voltage is defined as the applied voltage when a maximum electric field position moves from the center of the end of the micro hollow tube structure into the edge of the end of the micro hollow tube structure just below the rim of the tip of the microelectrode.
Dependencies are inferred from the claim text.