Low oxygen content, crack-free heusler and heusler-like alloys & deposition sources & methods of making same

Abstract

A method of forming Heusler or Heusler-like alloys of formula X2YZ or XYZ comprises providing a crucible comprised of at least one metal oxide material thermodynamically stable to molten transition metals; supplying predetermined amounts of constituent elements or master alloy materials of the alloy to the crucible; and melting the constituent elements or master alloy materials under vacuum or a partial pressure of an inert gas to form alloys containing less than about 50 ppm oxygen. Crack-free alloys are formed by casting the alloys in a mold utilizing a multi-stage stress-relieving, heat-assisted casting process. Also disclosed are crack-free Heusler and Heusler-like alloys of formula X2YZ or XYZ containing less than about 50 ppm oxygen and deposition sources, e.g., sputtering targets, fabricated therefrom.

Dependencies are inferred from the claim text.