SPUTTERING TARGET OF Li3PO4 AND METHOD FOR PRODUCING SAME
AssigneeInfinite Power Solutions, Inc.
InventorsBERND J. NEUDECKER, Vassiliki Milonopoulou
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Abstract
A method of forming a lithium orthophosphate sputter target or tile and resulting target material is presented. The target is fabricated from a pure lithium orthophosphate powder refined to a fine powder grain size. After steps of consolidation into a ceramic body, packaging and degassing, the ceramic body is densified to high density, and transformed into a stable single phase of pure lithium orthophosphate under sealed atmosphere. The lithium orthophosphate target is comprised of a single phase, and can preferably have a phase purity greater than 95% and a density of greater than 95%.
Claims25
A method of forming a target, comprising:
- providing a lithium orthophosphate powder;
- refining the powder to a grain size of equal to or less than 75 microns;
- applying cold isostatic pressure processing to form a body;
- degassing said body;
- applying hot isostatic pressure processing to said body to form a dense body of single-phase lithium orthophosphate;
- and
- finishing said dense body to form a target.
A lithium orthophosphate target comprising a single phase comprising a phase purity greater than 90% and a density greater than 90%.
Dependencies are inferred from the claim text.