Method For Operating a Pulsed Arc Evaporation Source and Vacuum Process System Comprising Said Pulsed Arc Evaporation Source
AssigneeOerlikon Trading AG, Trubbach
InventorsJürgen Ramm, Beno Widrig, Daniel Lendi, Volker Derflinger, Andreas Reiter
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Abstract
A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated while being connected to a single pulsed power supply.
Claims30
Vacuum process installation for the surface working of workpieces (3) with an arc evaporator source (5) comprising a first electrode (5′) connected to a DC power supply (13) and with a second electrode (3, 18, 20) disposed separately from the arc evaporator source (5), characterized in that the two electrodes (5′, 3, 18, 20) are connected to a pulsed power supply (16).
Method for the surface working of workpieces (3) in a vacuum process installation (1) in that with a first electrode (5′) of an arc evaporator source (5) and with a second electrode (3, 18, 20) disposed separated from the arc evaporator source (5) a layer is deposited onto the workpiece (3), wherein the arc evaporator source (5) is fed with a DC current, characterized in that both electrodes (5′, 3, 18, 20) are operated connected to a single pulsed power supply (16).
Dependencies are inferred from the claim text.