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US 2008/0173366 A1Published application
Gas box module of semiconductor device manufacturing equipment
OwnerTae-Kyung Kwoninventor
Life of this patent
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Abstract
Example embodiments relate to a gas box module for supplying a process gas into a semiconductor device manufacturing equipment. The gas box module may include a component adapted to supply the process gas into a process chamber and a block part. The component may have a first mating portion, and the block part may have a second mating portion adapted to correspond to the first mating portion, so as to align and secure the component to the block part.
Claims20
A gas box module for supplying a process gas into a semiconductor device manufacturing equipment, the gas box module comprising:
- a component adapted to supply the process gas into a process chamber, the component including a first mating portion;
- and
- a block part having a second mating portion adapted to correspond to the first mating portion, so as to align and secure the component to the block part.
Dependencies are inferred from the claim text.