Micro-machined temperature dependent one-shot valve and process for production thereof
AssigneeCanon Kabushiki Kaisha
InventorAlexis Debray
Life of this patent
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Abstract
A micro-machined temperature dependent one-shot valve is provided which has an operation temperature adjustable readily, causing no leakage below the operation temperature even at a high pressure difference, being useful both in a liquid environment and in a gas environment, and being miniaturizable. The micro-machined temperature dependent one-shot valve comprises a silicon substrate 100, a channel 101 penetrating the entire thickness of the silicon substrate, and a low melting point metal member 101 deposited on one face of the silicon substrate to obstruct the channel.
Claims19
A valve, comprising
- a silicon substrate,
- a channel penetrating the entire thickness of the silicon substrate,
- a low melting point metal member deposited on one face of the silicon substrate to obstruct the channel.
A process for producing a valve comprised of a channel perforated through the entire thickness of a silicon substrate, and a low melting point metal member deposited on one face of the silicon substrate to obstruct the channel, comprising the steps of:
- forming a channel through the entire thickness of the silicon substrate, and
- depositing the low melting point metal member on a face of the silicon substrate to obstruct the channel.
Dependencies are inferred from the claim text.