Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
AssigneeNitto Denko Corporation
InventorsMakoto NAMIKAWA, Yoshio Terada, Jirou Nukaga
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Abstract
A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
Claims14
1-3. (canceled)
A cleaning sheet which comprises a base material, a porous layer formed as a cleaning layer on one side of the base material, and an adhesive layer formed on the other side of the base material, wherein the porous layer comprises a plastic and has a tackiness of 0.05 N/10 mm or lower in terms of a strength of 180° C. peeling and a thickness of 5 to 500 μm.
(canceled)
(canceled)
Dependencies are inferred from the claim text.