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US 2008/0173092 A1Published application
Motion sensor, accelerometer, inclination sensor, pressure sensor, and tactile controller
AssigneesYamaha Corporation, Tokyo Institute of Technology
InventorsAtsuo Hattori, Kentaro Nakamura
Life of this patent
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Abstract
A motion sensor may include, but is not limited to, a substrate, a beam, a weight, a piezoelectric film, and a first electrode. The beam is supported by the substrate. The beam is elastically deformable. The weight is attached to the beam. The piezoelectric film follows and extends along at least a part of the beam. The piezoelectric film may include, but is not limited to, an organic piezoelectric film. The first electrode is disposed on the piezoelectric film.
Claims11
A motion sensor comprising:
- a substrate;
- a beam being supported by the substrate, the beam being elastically deformable;
- a weight attached to the beam;
- a piezoelectric film following and extending along at least a part of the beam, the piezoelectric film comprising an organic piezoelectric film;
- and
- a first electrode on the piezoelectric film.
3 more elements
An accelerometer comprising:
- a motion sensor comprising:
- a substrate;
- a beam being supported at both sides thereof by the substrate, the beam being elastically deformable;
- a weight attached to the center area of the beam;
- a piezoelectric film following and extending along at least a part of the beam, the piezoelectric film comprising an organic piezoelectric film;
- and
- a first electrode on the piezoelectric film, the first electrode comprises a plurality of electrode patterns which are disposed around the weight;
- and
- an output detecting unit that is connected to at least two of the electrode patterns, the output detecting unit detecting the outputs from the at least two of the electrode patterns, and the output detecting unit comprising an acceleration detecting unit that detects acceleration based on the outputs that appear at the at least two of the electrode patterns when an acceleration is applied to the weight.
6 more elements
An inclination sensor comprising:
- a motion sensor comprising:
- a substrate;
- a beam being supported at both sides thereof by the substrate, the beam being elastically deformable;
- a weight attached to the center area of the beam;
- a piezoelectric film following and extending along at least a part of the beam, the piezoelectric film comprising an organic piezoelectric film;
- and
- a first electrode on the piezoelectric film, the first electrode comprises a plurality of electrode patterns which are disposed around the weight;
- an excitation voltage applying unit that is connected to at least two of the electrode patterns, the excitation voltage applying unit that applies an excitation voltage to the at least two of the electrode patterns;
- and
- an output detecting unit that is connected to other electrode patterns, the output detecting unit detecting the outputs from the other electrode patterns, and the output detecting unit comprising an inclination detecting unit that detects a tilt angle of the inclination sensor based on the change of a resonant frequency, the change of the resonant frequency being caused by an inclination of the weight.
7 more elements
A pressure sensor comprising:
- a motion sensor comprising:
- a substrate;
- a beam being supported at both sides thereof by the substrate, the beam being elastically deformable;
- a weight attached to the center area of the beam;
- a piezoelectric film following and extending along at least a part of the beam, the piezoelectric film comprising an organic piezoelectric film;
- and
- a first electrode on the piezoelectric film, the first electrode comprises a plurality of electrode patterns which are disposed around the weight;
- an excitation voltage applying unit that is connected to at least two of the electrode patterns, the excitation voltage applying unit that applies an excitation voltage to the at least two of the electrode patterns;
- and
- an output detecting unit that is connected to other electrode patterns, the output detecting unit detecting the outputs from the other electrode patterns, and the output detecting unit comprising a pressure detecting unit that detects an external pressure that is applied to the inclination sensor based on the change of a resonant frequency, the change of the resonant frequency being caused by applying an external pressure to the weight.
7 more elements
A tactile controller comprising:
- a motion sensor comprising:
- a substrate;
- a beam being supported at both sides thereof by the substrate, the beam being elastically deformable;
- a weight attached to the center area of the beam;
- a piezoelectric film following and extending along at least a part of the beam, the piezoelectric film comprising an organic piezoelectric film;
- and
- a first electrode on the piezoelectric film, the first electrode comprises a plurality of electrode patterns which are disposed around the weight;
- an excitation voltage applying unit that is connected to at least two of the electrode patterns, the excitation voltage applying unit that applies an excitation voltage to the at least two of the electrode patterns;
- an output detecting unit that is connected to other electrode patterns, the output detecting unit detecting the outputs from the other electrode patterns;
- and
- a tactile control unit being connected between the excitation voltage applying unit and the output detecting unit, the tactile control unit that controls the excitation voltage based on the change of the resonant frequency being caused upon touching the weight.
8 more elements
Dependencies are inferred from the claim text.