Sensor module for a probe of a tactile coordinate measuring machine
AssigneeCarl Zeiss Industrielle Messtechnik GmbH
InventorsKarl Seitz, Roland Roth, Walter Dominicus, Wolfgang Strauss
Life of this patent
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Abstract
A sensor module for a probe of a tactile coordinate measuring machine has a stationary module base which defines a first measurement plane. The sensor module has a support, which is moveable relative to the module base, for holding a stylus. At least one deformable connecting element movably interconnects the support and the module base. The connecting element has at least a first and a second deformable material layer which, perpendicular to the first measurement plane, are arranged offset with respect to each other. In a preferred embodiment, the sensor module is made from two single-layer module parts arranged above and attached to one another.
Claims20
A sensor module for a probe of a tactile coordinate measuring machine, comprising a stationary module base which defines a first measurement plane, comprising a support moveable relative to the module base for holding a stylus, and comprising at least one deformable connecting element which movably interconnects the support and the module base, wherein the connecting element has at least a first and a second deformable material layer which, perpendicular to the first measurement plane, are arranged offset with respect to each other.
A multilayer sensor module for a probe of a tactile coordinate measuring machine, the sensor module comprising
- at least two module parts mounted on and secured to one another, with each module part having a module base in the form of a frame and a stylus support arranged inside the frame and connected to the frame via a deformable material layer,
- wherein the two module parts are connected to one another both in the area of the frames and in the area of the stylus support,
- wherein the material layers are arranged at a mutual spacing from one another, and
- wherein each module part consists of a semiconductor material, with each material layer being integrally formed between the frame and the stylus support.
Dependencies are inferred from the claim text.