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AssigneeInternational Business Machines Corporation
InventorsGary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
Estimating the term…
A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
A computer program product comprising a computer readable medium including a computer readable program, wherein the computer readable program when executed on a computer causes the computer to:
A system comprising:
Dependencies are inferred from the claim text.