Method and System for Point of Use Recycling of ECMP Fluids

An electrochemical mechanical polishing fluid recycling method, comprising:

• selectively capturing a first portion of used electrochemical mechanical polishing fluid from a first electrochemical mechanical polishing station, the used electrochemical mechanical polishing fluid free of excess water from rinse or other process steps, the selective capturing leaving at least a second portion of used electrochemical mechanical polishing fluid uncaptured;
• refurbishing the first selected portion to create a first refurbished electrochemical mechanical polishing fluid;
• providing the first refurbished electrochemical mechanical polishing fluid to an electrochemical mechanical polishing station for use as an electrochemical mechanical polishing fluid;
• selectively capturing a third portion of used electrochemical mechanical polishing fluid from a second electrochemical mechanical polishing station different from the first electrochemical mechanical polishing station, the used electrochemical mechanical polishing fluid free of excess water from rinse or other process steps, the selective capturing leaving at least a fourth portion of used electrochemical mechanical polishing fluid uncaptured;
• refurbishing the third selected portion to create a third refurbished electrochemical mechanical polishing fluid;
• and
• providing the third refurbished electrochemical mechanical polishing fluid to an electrochemical mechanical polishing station for use as an electrochemical mechanical polishing fluid.

An apparatus, comprising:

• an electrochemical mechanical polishing tool having a chamber, at least one electrochemical mechanical polishing station, at least one electrochemical mechanical polishing fluid inlet, a controller, and at least one drain;
• and
• at least one recycling unit coupled with the at least one drain and the at least one electrochemical mechanical polishing fluid inlet, the recycling unit comprising:
• at least one valve coupled with the controller that selectively opens to allow a selected portion of used electrochemical mechanical polishing fluid to enter the at least one recycling unit;
• at least one measuring device for measuring the chemical composition of the used electrochemical mechanical polishing fluid;
• a replenishment system for replenishing the used electrochemical mechanical polishing fluid as a function of the measured chemical composition;
• and
• at least one outlet coupled with the at least one electrochemical mechanical polishing fluid inlet.

An electrochemical mechanical polishing fluid recycling unit, comprising:

• at least one valve coupled with a controller that selectively opens to allow a selected portion of used electrochemical mechanical polishing fluid to enter the at least one recycling unit;
• and
• a replenishment system for replenishing the used electrochemical mechanical polishing fluid, the replenishment system coupled with one or more device selected from the group consisting of:
• an unused electrochemical mechanical polishing fluid source, a dosing system, a measuring device, and combinations thereof.