Delivery device for deposition

A delivery device having an output face for providing gaseous materials for thin-film material deposition onto a substrate comprising:

• (a) a plurality of inlet ports comprising at least a first, second, and third inlet port capable of receiving a common supply for a first, second, and third gaseous material, respectively;
• and
• (b) a first plurality of first elongated emissive channels, a second plurality of second elongated emissive channels and a third plurality of third elongated emissive channels, each of the first, second, and third elongated emissive channels capable of gaseous fluid communication with one of corresponding first, second, and third inlet ports;
• wherein each of the first, second, and third elongated emissive channels extend in a length direction and are substantially in parallel;
• wherein each first elongated emissive channel is separated on each elongated side thereof from the nearest second elongated emissive channel by a third elongated emissive channel;
• wherein each first elongated emissive channel and each second elongated emissive channel is situated between third elongated emissive channels,
• wherein each of the elongated emissive channels in at least one plurality of the first, second and third plurality of elongated emissive channels is capable of directing a flow, respectively, of at least one of the first, second, and the third gaseous material substantially orthogonally with respect to the output face of the delivery device, which flow of gaseous material is capable of being provided, either directly or indirectly from each of the elongated emissive channels in the at least one plurality, substantially orthogonally to the surface of the substrate;
• wherein at least a portion of the delivery device is formed as a plurality of apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the first, second, and third gaseous materials from its corresponding inlet port to its corresponding elongated emissive channels, and wherein the apertured plates are substantially perpendicularly disposed with respect to the output face;
• and
• wherein for each of the first, second, and third plurality of elongated emissive channels, each individual elongated emissive channel comprises:
• (i) two separator plates that defines side walls along the length of the individual elongated emissive channel, one separator plate on each side of a central plate;
• (ii) a central plate that defines the width of the individual elongated emissive channel, which central plate is sandwiched between the two separator plates;
• and
• wherein the alignment of apertures of the two separator plates and central plate provides fluid communication with the supply of one of the first, second, or third gaseous materials and permits passage of only one of the first, second, or third gaseous materials into the individual elongated emissive channel.

A delivery device having an output face for providing gaseous materials for thin-film material deposition onto a substrate comprising:

• (a) a plurality of inlet ports comprising at least a first, a second, and a third inlet port capable of receiving a common supply for a first, a second and a third gaseous material, respectively;
• and
• (b) a first plurality of elongated emissive channels, a second plurality of elongated emissive channels and a third plurality of elongated emissive channels, each of the first, second, and third elongated emissive channels allowing gaseous fluid communication with one of corresponding first, second, and third inlet ports;
• wherein each of the first, second, and third plurality of elongated emissive channels extend in a length direction and are substantially in parallel;
• wherein each first elongated emissive channel is separated on each elongated side thereof from the nearest second elongated emissive channel by a third elongated emissive channel;
• wherein each first elongated emissive channel and each second elongated emissive channel is situated between third elongated emissive channels,
• wherein each of the elongated emissive channels in at least one plurality of the first, second and third plurality of elongated emissive channels is capable of directing a flow, respectively, of at least one of the first, second, and the third gaseous material substantially orthogonally with respect to the output face of the delivery device, which flow of gaseous material is capable of being provided, either directly or indirectly from each of the elongated emissive channels in the at least one plurality, substantially orthogonally to the surface of the substrate;
• and
• wherein the delivery device is formed as a plurality of apertured plates, disposed substantially in parallel with respect to the output face, and superposed to define a network of interconnecting supply chambers and directing channels for routing each of the first, second, and third gaseous materials from its corresponding inlet port to its corresponding plurality of elongated emissive channels.