Semiconductor device and method for fabricating the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorAkihiko Tsuzumitani
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Abstract
A semiconductor device of a dual-gate structure including a P-channel type field-effect transistor formed at a first region of a substrate and an N-channel type field-effect transistor formed at a second region of the substrate, includes a gate electrode including a polycrystalline silicon film continuously formed on the substrate to cover the first and second regions and a metal silicide film formed on the polycrystalline silicon film. The polycrystalline silicon film has a P-type part located on the first region and an N-type part coming into contact with the P-type part and located on the second region, and the P-type part is further doped with a heavier element than a P-type impurity that determines a conductivity type of the P-type part.
Claims5
1-15. (canceled)
A method for fabricating a semiconductor device of a dual-gate structure comprising a P-channel type field-effect transistor formed at a first region of a substrate and an N-channel type field-effect transistor formed at a second region of the substrate, said method comprising the steps of:
- continuously forming a polycrystalline silicon film on the substrate to cover the first and second regions;
- implanting a P-type impurity into a part of the polycrystalline silicon film located on the first region, thereby forming a P-type part;
- implanting an N-type impurity into a part of the polycrystalline silicon film located on the second region and coming into contact with the P-type part, thereby forming an N-type part;
- forming a metal film on the polycrystalline silicon film;
- and
- forming a metal silicide film by siliciding the metal film,
- wherein the difference in thickness between the P-type part and the N-type part is produced by the implantation of the P-type impurity and the implantation of the N-type impurity, and
- said method further comprises the step of normally tapering an end part of the P-type part located above the N-type part and at the interface between the P-type part and the N-type part of the polycrystalline silicon film.
Dependencies are inferred from the claim text.