Semiconductor device and manufacturing method thereof, liquid crystal television system, and el television system
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Yukie Suzuki
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Yukie Suzuki
Estimating the term…
It is an object of the present invention to provide a method for manufacturing a semiconductor device that has high driving ability (that is, large W/L) according to a method in which the use efficiency of a material is improved and the throughput and yield are enhanced. The present invention provides a method for a semiconductor device, which comprises the steps of forming a first conductive layer in contact with a semiconductor region, forming an insulating layer on the first conductive layer by one of droplet discharge and application, irradiating a portion of the insulating layer with laser light to form a mask pattern, and forming divided first conductive layers by etching with the use of the mask pattern as a mask.
A method for manufacturing a semiconductor device, comprising the steps of:
A method for manufacturing a semiconductor device, comprising the steps of:
A method for manufacturing a semiconductor device, comprising the steps of:
Dependencies are inferred from the claim text.