Method for fabricating metal substrates with high-quality surfaces
AssigneeLattice Power (Jiangxi) Corporation
InventorsChuanbing Xiong, Wenqing Fang, Li Wang, Guping Wang, Fengyi Jiang
Life of this patent
Estimating the term…
Loading patent…
AssigneeLattice Power (Jiangxi) Corporation
InventorsChuanbing Xiong, Wenqing Fang, Li Wang, Guping Wang, Fengyi Jiang
Estimating the term…
One embodiment of the present invention provides a method for fabricating a high-quality metal substrate. During operation, the method involves cleaning a polished single-crystal substrate. A metal structure of a predetermined thickness is then formed on a polished surface of the single-crystal substrate. The method further involves removing the single-crystal substrate from the metal structure without damaging the metal structure to obtain the high-quality metal substrate, wherein one surface of the metal substrate is a high-quality metal surface which preserves the smoothness and flatness of the polished surface of the single-crystal substrate.
A method for fabricating a high-quality metal substrate, comprising:
A method for fabricating a high-quality composite metal-semiconductor substrate, comprising:
A high-quality metal substrate, wherein the high-quality metal substrate is produced by:
A high-quality composite metal-semiconductor substrate, wherein the high-quality metal substrate is produced by:
Dependencies are inferred from the claim text.