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US 2008/0166551 A1Published application
Transparent conductive film and method for producing the same
AssigneeNitto Denko Corporation
InventorsKazuaki SASA, Kazunori KAWAMURA
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Abstract
A transparent conductive film comprising: an organic polymer film substrate; an Al2O3 thin film formed on the organic polymer film substrate; and a ZnO-based thin film that is formed on the Al2O3 thin film and comprises ZnO doped with at least one of Ga and Al. The transparent conductive film has a low resistance value, even when the thickness of the ZnO-based thin film is reduced (particularly to about 150 nm or less), and shows a low rate of resistance change even in a hot and humid environment.
Claims20
A transparent conductive film, comprising:
- an organic polymer film substrate;
- an Al2O3 thin film formed on the organic polymer film substrate;
- and
- a ZnO-based thin film that is formed on the Al2O3 thin film and comprises ZnO doped with at least one of Ga and Al.
1 more element
Dependencies are inferred from the claim text.