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AssigneeHeraeus, Inc.
InventorsFenglin YANG, Carl Derrington, Bernd Kunkel
Estimating the term…
A method of making Re and Re-based materials comprises steps of: providing a Re powder starting material or a Re powder starting material and at least one additional powder material; subjecting at least the Re powder to a first degassing treatment for reducing the oxygen content thereof; increasing the density of the degassed Re powder or a mixture of the degassed Re powder and the at least one additional powder material to form a green billet; subjecting the billet to a second degassing treatment to further reduce the oxygen content; and consolidating the billet to form a consolidated material with greater than about 95% of theoretical density and low oxygen content below about 200 ppm for Re and below about 500 ppm for Re-based materials formed from the mixture, excluding oxygen from non-metallic compounds and ceramics. Materials so produced are useful in the manufacture of deposition sources such as sputtering targets.
A method comprising steps of:
A deposition source comprising consolidated Re powder material having greater than about 95% of theoretical density and oxygen content below about 200 ppm.
A deposition source comprising consolidated Re—X powder material, where X is at least one transition metal element, said consolidated Re—X powder material having greater than about 95% of theoretical density, oxygen content below about 500 ppm, a Re phase, an X phase, and a Re—X phase.
A deposition source comprising consolidated Re—Y powder material, where Y is at least one non-metallic element, non-metallic compound, or ceramic material, said consolidated Re—Y powder material having greater than about 95% of theoretical density and oxygen content below about 500 ppm, excluding oxygen from non-metallic compounds and/or ceramics.
A deposition source comprising consolidated Re—X—Y powder material, where X is at least one transition metal element and Y is at least one non-metallic element, non-metallic compound, or ceramic material, said consolidated Re—X—Y powder material having greater than about 95% of theoretical density and oxygen content below about 500 ppm, excluding oxygen from non-metallic compounds and/or ceramics.
Dependencies are inferred from the claim text.