Method and apparatus for producing grating, and DFB solid-state dye laser based on the grating
AssigneeMinebea Co., Ltd.
InventorMakoto Fukuda
Life of this patent
Estimating the term…
Abstract
To provide a DFB solid-state dye laser including a grating having Moire interference fringes. A DFB solid-state dye laser element includes: a laser medium containing an organic dye; and a distribution feedback type resonance unit having a third grating including a Moire fringe corresponding to an overlap between a first grating and a second grating formed in different directions. The third grating including a Moire fringe is formed by irradiating a photoresist with a laser for two-beam interference exposure, and then rotating a substrate by a predetermined angle and re-irradiating the substrate with the laser.
Claims4
A DFB solid-state dye laser element comprising:
- a laser medium containing an organic dye;
- and
- a distribution feedback type resonance unit having a third grating including a Moire fringe corresponding to an overlap between first and second gratings formed in different directions.
A method of producing a grating with two-beam interference exposure, comprising the steps of:
- depositing a photoresist on a substrate;
- exposing the photoresist to two beams interfering with each other to record a first stripe pattern corresponding to a light and dark pattern of an interference fringe of the two beams;
- relatively rotating the substrate and an array direction of the light and dark pattern of the interference fringe by a predetermined angle;
- exposing the photoresist to the two beams to record a second stripe pattern in a direction different from the array direction of the first stripe pattern;
- and
- removing an uncured portion of the photoresist to develop first and second gratings corresponding to the first and second stripe patterns, wherein
- the predetermined angle is set to an angle at which a Moire fringe corresponding to an overlap between the first and second gratings is formed with a period equal to or longer than periods of the first and second gratings.
Dependencies are inferred from the claim text.