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US 2008/0165406 A1Published application
Subsurface Reticle
OwnerEhud Galun, Nisim Hadar +10inventors
InventorsEhud Galun, Nisim Hadar, Alon Tavory, Israel Vilenchik, Ephraim Argaman, Gidon Slosberg, Moshe Toker, Yosef Kigel, Guy Ben-Zvi, Rami Cohen, Vladimir Dmitriev, Sergey Oshemkov
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Abstract
A reticle device is disclosed, comprising a transparent substrate provided with subsurface reticle design inscribed within the substrate.
Claims14
A reticle device comprising a transparent substrate provided with subsurface reticle design inscribed within the substrate.
A method of inscribing a subsurface reticle design within a transparent substrate, the method comprising:
- providing an optical system comprising a primary light beam source, a beam splitter, a light modulation array, and a focusing lens array;
- placing the substrate in front of the optical system;
- generating using the light source a primary light beam of a predetermined polarization;
- splitting the primary light beam into a plurality of secondary light beams, arranged in a two-dimensional array;
- separately modulating each secondary beam;
- and
- focusing the secondary beams onto a predetermined target within the substrate so as to inscribe a reticle design of a predetermined pattern.
4 more elements
Dependencies are inferred from the claim text.