Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsThomas GRASSHOFF, Thomas KLOSE, Thilo SANDNER
Life of this patent
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Abstract
A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.
Claims18
A micromechanical device, comprising:
- an oscillation system comprising an oscillation body;
- an elastic suspension, by means of which the oscillating body is oscillatorily suspended, wherein the elastic suspension comprises at least two spring beams;
- an adjuster for adjusting the resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension to each other.
A light-deflecting apparatus, comprising:
- a micromechanical device, comprising:
- an oscillation system comprising an oscillation body;
- an elastic suspension, by means of which the oscillating body is oscillatorily suspended, wherein the elastic suspension comprises at least two spring beams;
- an adjuster for adjusting the resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension to each other,
- wherein the oscillation body is a deflection mirror;
- a drive for operating the oscillation system at the resonant frequency.
A method for operating a micromechanical device with an oscillation system comprising an oscillation body and an elastic suspension, by means of which the oscillation body is oscillatorily suspended, wherein the elastic suspension comprises at least two spring beams, the method comprising:
- adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other.
Dependencies are inferred from the claim text.