Method and system for providing a high definition triangulation system

A method for detecting features of a target object using a triangulation system, comprising:

• producing a laser beam having a wavelength less than that of infrared radiation;
• focusing the laser beam on an object;
• detecting radiation reflected from the object due to impingement of the laser beam on the object;
• based on the detecting, determining at least one dimension of at least one feature of the object;
• and
• using the laser beam to produce a spot size that is equal to one which would be produced by a laser beam having an approximately infrared radiation wavelength, the spot size being produced by increasing an F# of optics of the triangulation system.

A radiation beam scanning triangulation method, comprising:

• producing a radiation beam;
• focusing the radiation on an object;
• reducing aberrations that cause field tilt and curvature;
• detecting radiation reflected from the object due to impingement of the radiation beam on the object;
• and
• determining, based on the detected radiation, at least one dimension of at least one feature of the object.

A triangulation system, comprising:

• a laser diode that produces a laser beam having a wavelength shorter than that of infrared radiation;
• optics adapted to focus the laser beam on an object;
• a radiation detection unit configured to detect radiation reflected from the object due to impingement of the laser beam on the object;
• and
• an arrangement configured to determine, based on the detected radiation, at least one dimension of at least one feature of the object.

A scanning radiation beam triangulation system, comprising:

• a radiation source that produces a beam of radiation;
• optics adapted to focus the radiation beam on an object and including at least one of tilted projection optics and a prism wavefront corrector adapted to reduce aberrations that cause a field tilt and curvature;
• a radiation detection unit adapted for detecting radiation reflected from the object due to impingement of the radiation beam on the object;
• and
• a processor configured to determine, based on the detected radiation, at least one dimension of at least one feature of the object.

A scanning laser beam triangulation system, comprising:

• a laser diode that produces a laser beam having a wavelength that at least one of:
• (a) is centered in a range of 380 to 570 nm;
• (b) corresponds to one of green light, blue light, and violet light;
• and
• (c) is shorter than that of visible light;
• an optics assembly adapted for focusing the laser beam on an object and including:
• a collimator lens configured to collimate the laser beam;
• an acousto-optic deflector configured to deflect the laser beam;
• and
• at least one of tilted projection optics and a prism wavefront corrector;
• a positioning assembly adapted for fixing the laser diode and the collimator lens in a relative position;
• a light detection unit configured to detect light reflected from the object due to impingement of the laser beam on the object and including a silicon detecting element;
• a coating positioned on the silicon detecting element and adapted to match an optical index of refraction of the light detecting element to an optical index of refraction of air, the matching being customized for a range of oblique angles at which the light reflected from the object is able to approach the light detecting element and for the wavelength of the laser beam;
• and
• a processor configured to determine, based on the detected light, at least one dimension of at least one feature of the object.