Piezoelectric inkjet head and method of manufacturing the same

A method of manufacturing a piezoelectric inkjet head, comprising:

• (a) preparing an upper substrate, a middle substrate, and a lower substrate, which are formed of silicon;
• (b) forming an ink inlet and a plurality of pressure chambers to be filled with ink to be ejected by finely processing the upper substrate;
• (c) forming a manifold connected to the ink inlet, a plurality of restrictors that connect the manifold to the pressure chambers, and a plurality of first dampers in locations corresponding to the pressure chambers by finely processing the middle substrate;
• (d) forming a plurality of nozzles to eject the ink by finely processing the lower substrate;
• (e) bonding the lower substrate, the middle substrate, and the upper substrate by sequentially stacking them;
• and
• (f) forming a plurality of piezoelectric actuators that provide a driving force to eject ink on the upper surface of the upper substrate,
• wherein (c) comprises forming a membrane under the manifold to mitigate a rapid pressure change in the manifold using a material different from the material used to form the middle substrate, and
• (c) or (d) comprises forming a cavity located under the membrane and at least one venting channel that connects the cavity to the outside on the lower surface of the middle substrate or the upper surface of the lower substrate.

A piezoelectric inkjet head, comprising:

• an ink flow channel including:
• a manifold connected to an ink inlet to receive ink from an outside source,
• a plurality of pressure chambers to be filled with ink received from the manifold,
• a plurality of restrictors that connect the manifold to the pressure chambers to restrict the flow of ink therebetween,
• a plurality of dampers formed to correspond with respective ones of the pressure chambers to eject the ink from the respective pressure chambers,
• a membrane that forms a surface of the manifold to mitigate a rapid pressure change in the manifold, the membrane being formed of a material different from the material used to form walls of the manifold, and
• a cavity formed under the membrane and between the manifold walls to allow the membrane to flex to absorb pressure from the ink received through the ink inlet.