Electrostatic actuator, droplet discharging head, method of manufacturing thereof and droplet discharging device

A method of manufacturing an electrostatic actuator having a fixed electrode formed on a substrate, a movable electrode placed at a position opposing the fixed electrode via a predetermined gap, and a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode, the method comprising:

• forming the fixed electrode on a glass substrate;
• forming an insulating film made of HfxAlyOz by an atomic layer deposition (ALD) method on an entire surface of a silicon substrate bonded to the glass substrate;
• bonding the glass substrate to the silicon substrate with anodization;
• thinning the silicon substrate on the bonded substrate to be a thin plate;
• forming the movable electrode by etching a surface of the silicon substrate, which opposes the bonded surface of the silicon substrate.

A method of manufacturing an electrostatic actuator having a fixed electrode formed on a substrate, a movable electrode placed at a position opposing the fixed electrode via a predetermined gap, and a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode, the method comprising:

• forming the fixed electrode on a glass substrate;
• forming an insulating film made of HfxAlyOz by an atomic layer deposition (ALD) method on the fixed electrode;
• bonding the glass substrate to the silicon substrate with anodization;
• thinning the silicon substrate on the bonded substrate to be a thin plate;
• and
• forming the movable electrode by etching a surface of the silicon substrate, which opposes the bonded surface of the silicon substrate.

A method of manufacturing an electrostatic actuator having a fixed electrode formed on a substrate, a movable electrode placed at a position opposing the fixed electrode via a predetermined gap, and a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode, the method comprising:

• forming the fixed electrode on a glass substrate;
• forming an SiO2 insulating film on the fixed electrode;
• forming an insulating film made of HfxAlyOz by an atomic layer deposition (ALD) method on an entire surface of a silicon substrate bonded to the glass substrate;
• bonding the glass substrate to the silicon substrate with anodization;
• thinning the silicon substrate on the bonded substrate to be a thin plate;
• and
• forming the movable electrode by etching a surface of the silicon substrate, which opposes the bonded surface of the silicon substrate.

A method of manufacturing an electrostatic actuator having a fixed electrode formed on a substrate, a movable electrode placed at a position opposing the fixed electrode via a predetermined gap, and a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode, the method comprising:

• forming the fixed electrode on a glass substrate;
• forming an insulating film made of HfxAlyOz by an atomic layer deposition (ALD) method on the fixed electrode;
• forming an SiO2 insulating film on the entire surface of the silicon substrate bonded to the glass substrate;
• bonding the glass substrate to the silicon substrate with anodization;
• thinning the silicon substrate on the bonded substrate to be a thin plate;
• and
• forming the movable electrode by etching a surface of the silicon substrate, which opposes the bonded surface of the silicon substrate.