Temperature Control Device and Temparature Control Method
AssigneeAdvantest Corporation
InventorsMasakazu Ando, Hiroyuki Takahashi, Tsuyoshi Yamashita, Takashi Hashimoto
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Abstract
Pressing an electronic device (2) to be tested to contact terminals (132a and 132b) while bringing a heater (112) having equal or close temperature change characteristics to those of the electronic device to be tested by a test pattern, transmitting a test pattern to the electronic device to be tested in this state, and controlling a power consumption of a heater so that total power of a power consumption of the electronic device to be tested by the test pattern and a power consumption of the heater becomes a constant value.
Claims24
A temperature control device used for an electronic device testing apparatus for conducting a test on an electronic device to be tested by sending a test pattern to the electronic device to be tested and detecting a response pattern thereto, comprising:
- a temperature adjusting device provided to contact with said electronic device to be tested;
- and
- a power control means for controlling power consumption of said temperature adjusting device, so that total power of a power consumption of said electronic device by said test pattern and a power consumption of said temperature adjusting device becomes a constant value.
A temperature control method for conducting a test on an electronic device to be tested by transmitting a test pattern to said electronic device to be tested and detecting a response pattern thereto, comprising the steps of:
- bringing a temperature adjusting device to said electronic device to be tested;
- and
- controlling a power consumption of said temperature adjusting device, so that a total power of a power consumption of said electronic device to be tested and a power consumption of said temperature adjusting device becomes a constant value.
An electronic device testing handler, comprising:
- a pusher for pressing an electronic device to be tested against a contact terminal, to which a test pattern is input;
- and
- a temperature adjusting device provided to said pusher so as to contact with said electronic device to be tested;
- wherein a power consumption of said temperature adjusting device is controlled, so that total power of a power consumption of said electronic device to be tested by said test pattern and a power consumption of said temperature adjusting device becomes a constant value.
An electronic device testing apparatus, comprising:
- a test pattern generation means for generating a predetermined test pattern;
- a test pattern transmission means for transmitting a test pattern generated by said test pattern generation means to a contact terminal, against which a terminal of an electronic device to be tested is pressed;
- a determination means for evaluating said electronic device to be tested based on a response pattern to said test pattern;
- and
- a power control means for controlling a power consumption of said temperature adjusting device, so that total power of a power consumption of said electronic device to be tested by said test pattern and a power consumption of a temperature adjusting device provided for contacting with said electronic device to be tested becomes a constant value.
An electronic device testing method for conducting a test on an electronic device to be tested by transmitting a predetermined test pattern to said electronic device to be tested via a contact terminal and detecting a response pattern thereto in a state of pressing a terminal of said electronic device to said contact terminal, comprising the steps of:
- bringing a temperature adjusting device contact with said electronic device to be tested;
- controlling a power consumption of said temperature adjusting device, so that total power of a power consumption of said electronic device to be tested by said test pattern and a power consumption of said temperature adjusting device becomes a constant value;
- and
- evaluating said electronic device to be tested based on a response pattern to said test pattern.
A temperature control device used in an electronic device testing apparatus for conducting a test on an electronic device to be tested by transmitting a test pattern to said electronic device to be tested and detecting a response pattern thereto, comprising:
- a heater for dynamically heating said electronic device to be tested;
- a cooler made by a peltiert element for cooling or heating said electronic device to be tested;
- and
- a heat sink connected thermally to said cooler, for cooling or heating a heat release surface of said cooler.
Dependencies are inferred from the claim text.