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US 2008/0164893 A1Published application
Probe card for testing wafer
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-ae Lee, Ho-jeong Choi
Life of this patent
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Abstract
Provided is a probe card for testing a wafer. The probe card includes: a main card having a flat plate in which a hole is formed; an auxiliary card vertically mounted on the main card through the hole; and a plurality of probe needles attached to the auxiliary card. Costs and time for manufacturing the probe card are greatly reduced.
Claims20
A probe card, comprising:
- a main card having a flat plate, a hole being formed in the flat plate;
- an auxiliary card vertically mounted on the main card through the hole;
- and
- a plurality of probe needles attached to the auxiliary card.
1 more element
A probe card, comprising:
- a main card having a flat plate, a hole being formed in the flat plate;
- an auxiliary card vertically mounted on the main card through the hole;
- a plurality of probe needles attached to the auxiliary card;
- and
- an adjusting portion installed above the main card and moving the auxiliary card forward and backward.
2 more elements
A probe card, comprising:
- a main card having a flat plate, a hole being formed in the flat plate;
- an auxiliary card vertically mounted on the main card through the hole;
- a plurality of probe needles attached to the auxiliary card;
- and
- an X-axis adjusting portion installed above the main card and moving the auxiliary card in an X-axis;
- and
- an Y-axis adjusting portion installed below the X-axis adjusting portion and moving the X-axis adjusting portion in an Y-axis.
4 more elements
A probe card, comprising:
- a main card having a flat plate, a hole being formed in the flat plate;
- an auxiliary card vertically mounted on the main card through the hole;
- a plurality of probe needles attached to the auxiliary card;
- a probe needle which is attached to the auxiliary card and to which a power supply voltage is applied;
- and
- a power restricting portion electrically connected to the probe needle to which the power supply voltage is applied and preventing an overvoltage or overcurrent from being applied to the probe needle to which the power supply voltage is applied.
3 more elements
Dependencies are inferred from the claim text.