Probe and Probe Card
AssigneeTokyo Electron Limited
InventorKiyoshi Takekoshi
Life of this patent
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Abstract
An object of the present invention is to make it possible that a probe for testing electrical characteristics of an object to be tested is easily attached to a support member such as a contactor. A through hole is formed in the contactor. In the probe, a fitting/locking portion which can be fitted in this through hole is formed. The fitting/locking portion is formed to penetrate the through hole of the contactor and to be locked in the contactor in a state that a tip thereof is in contact with a connecting terminal of a printed wiring board. The fitting/locking portion itself is locked in the contactor by hooking a locking portion thereof to an end face on an upper side of the through hole.
Claims18
A probe for testing electrical characteristics of an object to be tested,
- wherein said probe is supported by a support member facing the object to be tested, and is constructed to be freely attachable to the support member by locking in said support member.
A probe card having a support member supporting a probe on one face and a circuit board facing the other face of the support member,
- wherein said probe is constructed to be freely attachable to the support member by locking in said support member, and is constructed to electrically conduct with said circuit board when attached to said support member.
Dependencies are inferred from the claim text.