Electrostatic capacity sensor

Abstract

An electrostatic capacity sensor includes a sensor die including a bias electrode and a signal electrode, which are positioned opposite to each other with a very small distance therebetween, and a shield member including a potential stabilizing conductive film whose external shape encompasses the vertically projected area of the signal electrode. The sensor die joins the joint surface of the shield member. The signal electrode is positioned between the bias electrode and the potential stabilizing conductive film. A noise shield adapted to the signal electrode is formed using the bias electrode and the potential stabilizing conductive film; hence, it is possible to improve the noise resistance of the signal electrode and to increase the S/N ratio in sensitivity.

Dependencies are inferred from the claim text.